| 摘要 |
PROBLEM TO BE SOLVED: To provide a work chuck rotary table mechanism having a hydraulic bearing. SOLUTION: This work chuck rotary table mechanism 2 is formed in an internal bearing structure in which a cylindrical bush 23 having water passages 23a, 25b in the inner wall thereof is used as the hydraulic bearing for a hollow spindle 22 for pivotally supporting a porous ceramic rotary chuck table 21, and which has a water supply port so formed in a cylindrical outer housing 24 as to communicate with the water passages 23a, 25b formed in the cylindrical bush, a vacuum depressuring port 24b, a drain port 24d, and a compressed air supply port 24c. Since the water in the water passages 23a, 25b of the hydraulic bearing is discharged through the drain port 24d by depressuring and compressed air when the operation of the work chuck rotary table mechanism is stopped for a long period and the inside of the water passage is dried, algae do not grow. COPYRIGHT: (C)2009,JPO&INPIT
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