发明名称 METHOD FOR TREATING PLASMA UNDER CONTINUOUS ATMOSPHERIC PRESSURE OF WORK PIECES, IN PARTICULAR, MATERIAL PLATES OR STRIPS
摘要 The invention relates to a method for treating plasma under continuous atmospheric pressure of, in particular, electrically insulating workpieces, in particular material plates or strips. According to said method, the workpiece which is to be machined, is arranged at a distance below at least one electrode which is made of two barrier electrodes, which are arranged in a successive manner in the direction of displacement with a gap, and which extends in a manner which is transversal to the direction of displacement at least over the width of the surface of the workpiece which is to be machined. The electrode and the workpiece are mutually offset in the direction of displacement. High voltage, which is in the form of an alternating voltage, is applied to the barrier electrodes, in order to provoke at least plasma discharge in the gap. The plasma discharge is driven by the gas flow from the gap in the direction of the surface of the workpiece which is to be machined. The invention is characterised in that the surfaces of the barrier electrodes which are oriented towards the surface of the workpiece which is to be machined are impinged upon with high pressure.
申请公布号 WO2007016999(A3) 申请公布日期 2009.09.03
申请号 WO2006EP05839 申请日期 2006.06.19
申请人 SOFTAL ELECTRONIC ERIK BLUMENFELD GMBH & CO. KG;PRINZ, ECKHARD;PALM, PETER;FOERSTER, FRANK 发明人 PRINZ, ECKHARD;PALM, PETER;FOERSTER, FRANK
分类号 C23C16/50;C23C16/54;H05H1/24 主分类号 C23C16/50
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