| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding head in which a grinding wheel shaft is supported by a hydraulic bearing, and also to provide a surface grinding head system for a substrate. SOLUTION: In this grinding head 1, the grinding wheel shaft 13 pivotally supporting a cup wheel grinding wheel 14 is rotatably and linearly movably supported by the hydraulic bearing and a magnetic bearing 18. A grinding head system 1 for a substrate includes a water filler port communicating with the water passage 15k of the hydraulic bearing, a vacuum pressure reducing port 15b allowing water to easily pass through by reducing the pressure in the water passage 15k, a drain port 15d for draining the water in the water passage to the outside of a cylindrical outer housing, a compressed air supply port 15c for supplying compressed air into the water passage to prevent excess water from being supplied into the water passage, a cooling water passage 15e for cooling the inner wall of the cylindrical outer housing, and a cooling water passage 15h. Since the water in the water passage 15k of the hydraulic bearing is discharged through the drain port 15d by pressure reduction and compressed air when the operation of the grinder is stopped for a long period, and the inside of the water passage 15k is dried, so that algae do not grow. COPYRIGHT: (C)2009,JPO&INPIT
|
