| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device improving visibility of an inspection result. SOLUTION: The surface inspection device includes an inspection section for inspecting the surface of the circumferential portion of a wafer, which is formed disk-like, or the vicinity of the circumferential section; a graph creation section for creating a graph related to a result of a surface inspection by the inspection section; and a display section for displaying information related to the surface inspection by the inspection section, in which the display section displays the Fig.C1 of a circle simulating the shape of a wafer and also a bar graph C2 created by the graph creation section on the circumferential portion of the Fig.C1 radially by corresponding to a position in the circumferential direction of the circumferential portion of the wafer of which surface is inspected by the inspection section. COPYRIGHT: (C)2009,JPO&INPIT
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