METHOD AND APPARATUS FOR COATING POWDER MATERIAL ON SUBSTRATE

摘要

A method and apparatus for coating a powder material on a substrate are provided to minimize the bad effect of substrate by applying the powder of the small size of 0.1 ~ 10 mum. The chamber(100) accommodates the substrate support portion(300) and injection nozzle(400). The vacuum pump(200) is connected to the chamber. The substrate support portion moves to the X-axis and Y-axis by the predetermined drive unit(310). The injection nozzle comprises the first opening(410), and the second opening(420) and nozzle neck(430). The first opening is connected to the piping(600) and the nozzle neck is formed the between the first opening and the second opening. The gas inlet(500) is formed outside the chamber.