发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device including a low-concentration impurity region formed on the drain side of an n-type MIS transistor, in a non-self-aligned manner with respect to an end portion of the gate electrode. A high-concentration impurity region is placed with a specific offset from the gate electrode and a sidewall insulating film. The semiconductor device enables the drain breakdown voltage to be sufficient and the on-resistance to decrease. A silicide layer is also formed on the surface of the gate electrode, thereby achieving gate resistance reduction and high frequency characteristics improvement.
申请公布号 US2011133273(A1) 申请公布日期 2011.06.09
申请号 US201113022812 申请日期 2011.02.08
申请人 FUJITSU SEMICONDUCTOR LIMITED 发明人 SHIMA MASASHI
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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