| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planar motor device which is capable of easy energization control even in driving another object. <P>SOLUTION: This planar motor device includes a fixed part 16 which has one of a magnetizing unit and a coil unit to form a prescribed movement face, and a mobile part which has the other of the magnetizing unit and the coil unit and can move along a movement face. The coil unit has the first coil unit CU1 which moves the mobile part with its energization being controlled by the first control system CUC1, and the second coil unit CU2 which moves the second mobile part provided independent of the mobile part with its energization being controlled by the second control system CUC2 provided independent of the first control system. <P>COPYRIGHT: (C)2011,JPO&INPIT |
