发明名称 SHAFT MOTOR, STAGE DEVICE, AND EXPOSURE APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a shaft motor which can prevent the enlargement and price rise of a device. <P>SOLUTION: One of a shaft 60 and a cylinder 70 is provided with a magnetizer 61, and the other of the shaft and the cylinder is provided with a coil body CL. It has a position controller CD, CONT which adjusts the position of the axis of the shaft body and the position of the axis of the cylinder to be coaxial. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011115022(A) 申请公布日期 2011.06.09
申请号 JP20090272028 申请日期 2009.11.30
申请人 NIKON CORP 发明人 ICHINOSE TAKESHI
分类号 H02K41/02;H01L21/027;H02K41/03 主分类号 H02K41/02
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