| 摘要 |
PROBLEM TO BE SOLVED: To easily and instantly obtain permittivity of a minute region relating to a depth direction of a photosensitive layer as it is in a device state. SOLUTION: A device for measuring permittivity in a photosensitive layer includes a Raman spectrophotometer 7 which includes a microscopic optical system 9 including a separation optical element and an objective 17 for irradiating a photoreceptor 1 with laser beams in a visible region from a laser light source 8 and receiving Raman scattering light components from the photosensitive layer, a spectroscope 10 for dispersing Raman scattering light components, and a photodetector 11 for detecting intensity of Raman scattering light dispersed by the spectroscope and obtains Raman scattering light spectra from intensity of Raman scattering light detected by a photodetection section. Further, the measuring device of permittivity in a photosensitive layer includes: a correlation data storage unit 12 for storing correlation data between the intensity of characteristic Raman scattering peaks of the photosensitive layer and permittivity that have been measured in advance; and a permittivity operation unit 13 for calculating permittivity based on the correlation data by extracting intensity of characteristic Raman scattering peaks from the Raman scattering light spectra obtained by the Raman spectrophotometer. COPYRIGHT: (C)2011,JPO&INPIT |
