| 摘要 |
PROBLEM TO BE SOLVED: To provide a collimation plate reducing individual difference of a measurement result and reducing the load of measuring work, and also to provide a microscope device using the collimation plate. SOLUTION: This measuring microscope device 100 has: an image forming optical system for condensing light from an object S to be measured via an objective lens 31 and forming an optical image (enlarged image) S' of the object S to be measured; the collimation plate 33 that is arranged so as to substantially match with the enlarged image S' and includes a first surface (collimation surface) 34 having a collimation line 34a and a second surface (enlarged surface) 35 having a plane section 35a and at least one lens section 35b; and an eyepiece 36 for observing the optical image S'. COPYRIGHT: (C)2011,JPO&INPIT
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