SUBSTRATE MOUNTING TABLE AND METHOD FOR MANUFACTURING THE SAME, AND SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate mounting table, manufacturing method thereof, and substrate processing device are provided to suppress changes in thermal conduction efficiency and conduction efficiency, thereby eliminating irregularity such an etching blur. CONSTITUTION: A mounting table(5A) includes a conductive material and an insulating film(8). The insulating film is placed on a base material. A glass substrate for an FPD is mounted on a substrate mounting surface. The substrate mounting surface includes a roughening part(51) and a smoothing part(53). The roughness of the surface of the roughening part is larger than 2 micro meters and smaller than 6 micro meters. The roughness of the surface of the smoothing part is smaller than 2 micro meters.