APPARATUS FOR TRANSFERRING WAFER

摘要

PURPOSE: A wafer transferring device is provided to prevent the contamination of a wafer by polishing the surface of a receiver in contact with a wafer. CONSTITUTION: A robot hand(11) grips a wafer(1). An arm(12) linearly moves and rotates a robot hand. A driving unit(13) transmits driving force for moving and rotating the arm and the robot hand. A receiver for receiving the wafer is formed on the upper side of the robot hand. The receiver is formed to minimize the contact area with the wafer.