| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress variation in operation between loads while a plurality of loads are driven by one voltage waveform. <P>SOLUTION: Each capacitive load is driven by connecting an output of a voltage waveform output means to the plurality of capacitive loads. Connection of the capacitive load is released when the voltage of an output voltage waveform exceeds a voltage range set for each capacitive load, and the released connection is connected again when the voltage of the voltage waveform returns to within the voltage range. A different voltage waveform is impressed for each capacitive load. A voltage waveform suitable in accordance with characteristics of each capacitive load can be impressed to each capacitive load by setting each voltage range according to the characteristics of each capacitive load. Variation in operation between the capacitive loads can be suppressed by appropriately operating each capacitive load. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
