Sensor for mechanical pressure-measurement of surface, has metallization layer designed in form of contact points connected to evaluation logic that is arranged for evaluating change of electrical conductivity of monolithic structure

摘要

The sensor has a monolithic structure comprising nanotubes (2, 2a) that extend parallel to each other. Metallization layers (4, 6) are formed on sides of the nanotubes and designed in the form of contact points with an extension of 1 to 100 micrometer. The contact points are connected to an evaluation logic that is arranged for evaluating change of electrical conductivity of the monolithic structure as measure for mechanical force acting in an area of the contact points. A lattice structure made from gold is formed on an inner surface of a carbon layer.