| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor dispensing with an electrode unit and miniaturizing a sensor. <P>SOLUTION: The acceleration sensor includes a sensor unit comprising weight units 4, 5 where recesses 41, 51 and full units 40, 50 are formed integrally, pairs of beam units 6a, 6b, 7a, 7b, movable electrodes 4a, 5a, a first fixed electrode and a second fixed electrode, and a detection electrode. The acceleration sensor includes: an upper fixed plate 2a disposed with a prescribed interval to a surface at the sides of the movable electrodes 4a, 5a of the weight units 4, 5; and embedded electrodes A1-A4 made of a silicon material embedded along a thickness direction of the upper fixed plate 2a. In the embedded electrodes A1-A4, edges at sides opposing the movable electrodes 4a, 5a are used as fixed electrodes and the other edges are used as detection electrodes. <P>COPYRIGHT: (C)2011,JPO&INPIT |
