| 摘要 |
PROBLEM TO BE SOLVED: To provide a quality determination device, a quality determination method and a quality determination program capable of heightening convergence to threshold determination for distance discrimination analysis by reflecting a determination result of linear discrimination analysis having high reliability to the distance discrimination analysis, improving simple determination performance carried by the distance discrimination analysis, and obtaining excellent determination accuracy by using in common, linear discrimination analysis and the distance discrimination analysis. SOLUTION: This device includes: a parameter acquisition means for acquiring a plurality of parameters from an inspection object; a linear discrimination analysis means for comparing a variable acquired by substituting a parameter corresponding to the inspection object for a discrimination function calculated based on sample data with a threshold; a distance discrimination analysis means for comparing a distance from a center position of a nondefective cluster corresponding to nondefective sample data to the position of an element corresponding to the inspection object in a parameter space with a threshold, and a quality determination means for determining to be nondefective, when discriminated to be in a nondefective category both by the linear discrimination analysis means and the distance discrimination analysis means. COPYRIGHT: (C)2011,JPO&INPIT
|
