| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro electromechanical system (MEMS) optical scanner which is made compact and in which an angle of scanning light is broadened. SOLUTION: The MEMS optical scanner includes: a mirror forming substrate 1 having an outside frame part 10, a movable part 20 provided with a mirror face 21 and a pair of torsion spring parts 30, 30; and a first cover substrate 2 and a second cover substrate 3 connected to the mirror forming substrate 1. A driving means which drives the movable part 20 is composed of a fixed electrode 12 formed on the outside frame part 10 and a movable electrode 22 formed on the movable part 20. A plurality of fixed mirrors 6 are provided in line on the mirror forming substrate 1 side of the first cover substrate 2 to reflect the light, which is made incident through the first cover substrate 2 and reflected on the single mirror face 21, to the mirror face 21 side. COPYRIGHT: (C)2011,JPO&INPIT
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