| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oxidation catalyst the pressure loss of which is made small, the catalytic performance of which is restrained from being deteriorated due to the pressure loss thereof and which is used for oxidatively decomposing various gasses generated in the semiconductor manufacturing industry etc., the exhaust gas that is generated in general factories, homes, etc. and includes nitrogen-containing gas such as ammonia and amine and the exhaust gas that is generated in a thermal power station, various factories, etc. and includes excess oxygen and to provide an oxidative decomposition method using the oxidation catalyst. <P>SOLUTION: The oxidation catalyst is obtained by depositing at least one platinum group metal selected from Ru, Rh, Pd, Os, Ir and Pt on a carrier 10 which includes a coil-shaped cylindrical material 11 wound spirally at predetermined intervals and supports 12 joined along the axial direction of the coil-shaped cylindrical material 11 and is based on alumina. For example, a perfluoro-compound and a gaseous fluorine-containing compound including a chlorofluorocarbon are decomposed oxidatively in the coexistence of the oxidation catalyst and oxygen. <P>COPYRIGHT: (C)2011,JPO&INPIT |
