| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro electromechanical system (MEMS) optical scanner which is inexpensive, has high reliability and suppresses unnecessary reflection of light; and to provide a method of manufacturing the MEMS optical scanner. SOLUTION: The MEMS optical scanner includes: a mirror forming substrate 1 which is formed by using a silicon-on-insulator (SOI) substrate (semiconductor substrate) 100 and has an outside frame part 10, a movable part 20 provided with a mirror face 21 and a pair of torsion spring parts 30, 30; a first cover substrate 2 which is formed by using a first glass substrate 200 and connected to one surface side of the mirror forming substrate 1; and a second cover substrate 3 connected to the other surface side of the mirror forming substrate 1. The first cover substrate 2 and the second cover substrate 3 are formed in the same overall dimensions as the overall dimensions of the mirror forming substrate 1, and the first cover substrate 2 has, on the outer surface side opposite to the mirror forming substrate 1, a fine cyclic structure 6 which is formed of a translucent resin or a low melting point glass and suppresses light reflection. COPYRIGHT: (C)2011,JPO&INPIT
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