| 摘要 |
PURPOSE: An LED chip counter is provided to counter chips of a wafer using an inexpensive DSLR camera, thereby saving the costs for realizing a measuring system. CONSTITUTION: An LED(Light Emitting Diode) chip counter includes a light unit(20), a camera, and a computer(30). The camera is a DSLR camera. The light unit is located on the bottom of an object(40) to be measured. The light unit is arranged between the object to be measured and a table to increase the rate of accurately obtaining an image.
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