发明名称 METHOD OF ENABLING SELECTIVE AREA PLATING ON A SUBSTRATE
摘要 <p>A method of enabling selective area plating on a substrate (201) includes forming a first electrically conductive layer (310) on the substrate, covering the electrically conductive layer with an anti-electroless plating layer (410), patterning the substrate in order to form therein a feature (510, 520) extending through the anti-electroless plating layer and the first electrically conductive layer, forming a second electrically conductive layer (610) adjoining and electrically connected to the first electrically conductive layer, forming a third electrically conductive layer (710) over the second electrically conductive layer, and removing the anti-electroless plating layer and the first electrically conductive layer.</p>
申请公布号 KR20110060921(A) 申请公布日期 2011.06.08
申请号 KR20117007708 申请日期 2009.11.18
申请人 INTEL CORPORATION 发明人 LI YONGGANG;SALAMA ISLAM
分类号 H01L21/60;H01L23/12;H01L23/48 主分类号 H01L21/60
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