METHOD FOR FABRICATING SOLAR CELL

摘要

PURPOSE: A method for manufacturing a solar cell is provided to shorten wet cleaning time by removing impurity particles and an impurity layer formed on the surface of a substrate through a diffusion process. CONSTITUTION: A first conductive type silicon substrate is prepared(S100). A texturing process is performed to form an uneven part on the upper side of the first conductive type silicon substrate(S110). N type impurity ions are injected and diffused to the upper side of the first conductive type silicon substrate(S120). Impurity particles and impurity layer which is PSG(Phosphorus Silicate Glass) are formed on the surface of a silicon substrate(S130). The impurity particles are removed from the surface of the silicon substrate by using a vibration generated by a sound wave(S140). The impurity layer is removed from the surface of the silicon substrate through a wet cleaning process(S150).