| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film resonator with a piezoelectric element formed by using the thin film forming technology and not causing a bent and a manufacturing method thereof, and a drive unit and a piezoelectric motor employing the same. <P>SOLUTION: The piezoelectric thin film resonator includes: a resonator 4 for generating a traveling wave; a piezoelectric element 9 provided with a lamination structure comprising a lower electrode (first electrode layer) 3 formed on the front side of the resonator 4, a piezoelectric thin film (first piezoelectric thin film) 2 formed on the lower electrode 3, and a plurality of upper electrodes (second electrode layer demarcated into a plurality of divisions) 1a to 1d and 11a to 11d formed on the piezoelectric thin film 2; and a stress compensation membrane 8 formed on the rear side of the resonator 4, including the same lamination structure as any one layer of the lamination structure of the piezoelectric element section 9 and compensating an internal stress caused in the piezoelectric element section 9. <P>COPYRIGHT: (C)2007,JPO&INPIT |
