OXIDE EVAPORATION MATERIAL, TRANSPARENT CONDUCTING FILM, AND SOLAR CELL

摘要

PURPOSE: An oxide evaporation material, transparent conducting film, and solar cell are provided to reduce the deformation of property and composition. CONSTITUTION: An oxide evaporation material comprises a sintered body made of indium oxide and cesium. The content of cesium is 0.001~0.110 as Ce/In atomic structure. Tungsten is included to 0.001~0.020 in W/In atomic ratio. Molybdenum is included as 0.001~0.050 in Mo/In atomic ratio. The transparent conductive film(1) of crystalline is manufactured by an ion plating method, a high density plasma assist deposition method and an electron-beam evaporation method. The content of cerium is 0.001~0.110 in Ce/In atomic ratio.