发明名称 Wire bonding method and semiconductor device
摘要 Wire bonding method for reducing height of a wire loop in a semiconductor device, including a first bonding step of bonding an initial ball formed at a tip end of a wire onto a first bonding point using a capillary, thereby forming a pressure-bonded ball; a wire pushing step of pushing the wire obliquely downward toward the second bonding point at a plurality of positions by repeating a sequential movement for a plurality of times, the sequential movement including moving of the capillary substantially vertically upward and then obliquely downward toward the second bonding point by a distance shorter than a rising distance that the capillary has moved upward; and a second bonding step of moving the capillary upward and then toward the second bonding point, and bonding the wire onto the second bonding point by pressure-bonding.
申请公布号 US7851347(B2) 申请公布日期 2010.12.14
申请号 US20090589482 申请日期 2009.10.21
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 MII TATSUNARI;TEI SHINSUKE;KIUCHI HAYATO
分类号 H01L21/44 主分类号 H01L21/44
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