发明名称 Field-effect transistor
摘要 Provided is a field-effect transistor including an active layer and a gate insulating film, wherein the active layer includes an amorphous oxide layer containing an amorphous region and a crystalline region, and the crystalline region is in the vicinity of or in contact with an interface between the amorphous oxide layer and the gate insulating film.
申请公布号 US7851792(B2) 申请公布日期 2010.12.14
申请号 US20060089907 申请日期 2006.11.01
申请人 CANON KABUSHIKI KAISHA 发明人 AIBA TOSHIAKI;SANO MASAFUMI;KAJI NOBUYUKI
分类号 H01L29/786 主分类号 H01L29/786
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