| 摘要 |
<p>PURPOSE: A manufacturing method of a solar battery device is provided to improve the high crystalline of a semiconductor layer without the change of a process by injecting chlorine(Cl2) using a chemical vapor deposition method. CONSTITUTION: A first electrode(120) is formed on a substrate(140). One or more semiconductor layers(122,124,126) in which chlorine is included through a chemical vapor deposition method are formed on the first electrode. A second electrode(128) is formed on the semiconductor layer. The semiconductor layer is an amorphous silicon thin film including chlorine.</p> |
