发明名称 ALUMINUM BOND PAD WITH ENHANCED WIRE BOND STABILITY
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an aluminum bond pad with enhanced wire bond stability by preventing voids formed as an inter-metal compound is formed between a wire and a bond pad and atoms in the system are diffused when a gold wire is bonded to the aluminum bond pad in a thermal ultrasonic wave manner. <P>SOLUTION: An electronic device bond pad 140 includes an Al layer located over an electronic device substrate 120. The Al layer 210 contains intrinsic group 10 metal arranged therein. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2010278439(A) 申请公布日期 2010.12.09
申请号 JP20100119952 申请日期 2010.05.26
申请人 LSI CORP 发明人 BAIOCCHI FRANK A;DELUCCA JOHN M;OSENBACH JOHN W
分类号 H01L21/60 主分类号 H01L21/60
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