| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator formed in a structure to improve the durability and reliability by removing the electric charges of an insulating film, and to provide a liquid droplet ejecting head, a liquid droplet ejecting apparatus and a driving method for the electrostatic actuator. SOLUTION: The electrostatic actuator includes individual electrodes 11 formed on a substrate, a diaphragm 4 opposed via a gap G to the individual electrodes 11 and operating by an electrostatic force generated between the individual electrodes 11 and the diaphragm, a sealing material 9 which airtightly seals the gap G, and an X-ray generating device 40 which ionizes the atmosphere in the gap G by irradiating X rays. COPYRIGHT: (C)2011,JPO&INPIT
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