BONDING DEVICE, AND METHOD OF CORRECTING OFFSET AMOUNT OF BONDING DEVICE

摘要

PROBLEM TO BE SOLVED: To achieve excellent bonding in an easy method even if the optical axis of a camera is inclined. SOLUTION: An offset amount is corrected based upon the difference between a first shift amount and a second shift amount and an amount of Z-directional movement of a reference member by: acquiring a first image of a bonding tool and the reference member by moving the bonding head by the offset amount in a minus X direction after adjusting the position of the bonding head so that the reference member is in the center of a visual field; acquiring the first shift amount from the image; acquiring a second image of the bonding tool and reference member by moving the bonding head by the offset amount in the minus X direction after elevating the reference member and then moving the bonding head in a plus X direction so that the reference member is in the center of the visual field; and acquiring the second shift amount between the bonding tool and reference member in a first direction from the second image. COPYRIGHT: (C)2011,JPO&INPIT