SYSTEM FOR MEASURING LIQUID FLOW RATES

摘要

A system for monitoring non-volatile residue concentrations in ultra pure water includes a nebulizer for generating an aerosol composed of multiple water droplets, a heating element changing the aerosol to a suspension of residue particles, and a condensation particle counter to supersaturate the dried aerosol to cause droplet growth through condensation of a liquid onto the particles. The nebulizer incorporates a flow dividing structure that divides exiting waste water into a series of droplets. The droplets are counted to directly indicate a waste water flow rate and indirectly indicate an input flow rate of water supplied to the nebulizer. The condensation particle counter employs water as the condensing medium, avoiding the need for undesirable chemical formulations and enabling use of the ultra pure water itself as the condensing medium.