发明名称 |
GYROSCOPE UTILIZING MEMS AND OPTICAL SENSING |
摘要 |
A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis. In certain embodiments, the gyroscope is a microelectromechanical system (MEMS) gyroscope.
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申请公布号 |
US2010309474(A1) |
申请公布日期 |
2010.12.09 |
申请号 |
US20100770545 |
申请日期 |
2010.04.29 |
申请人 |
KILIC ONUR;DIGONNET MICHEL J F;KINO GORDON S;SOLGAARD OLAV |
发明人 |
KILIC ONUR;DIGONNET MICHEL J.F.;KINO GORDON S.;SOLGAARD OLAV |
分类号 |
G01C19/72 |
主分类号 |
G01C19/72 |
代理机构 |
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地址 |
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