发明名称 ELECTRICAL CONNECTION SYSTEM, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND METHOD FOR MANUFACTURING AN ELECTRICAL CONNECTION SYSTEM.
摘要 <p>An electrical connection system is disclosed. The electrical connection system comprises a housing, an elongate conductor and a flexible planar electrical connector. The housing comprises a front plate having a conducting surface and a back plate having a conducting surface. The elongate conductor extends through the front plate. The flexible planar electrical connector comprises a laminate that comprises, in order, a first flexible planar insulating layer, a conductor configured to carry an electrical current and a second flexible planar insulating layer. The flexible planar electrical connector is sandwiched by and extends beyond the front plate and the back plate. The elongate conductor is electrically connected to the conductor of the planar connector.</p>
申请公布号 NL2004924(A) 申请公布日期 2010.12.27
申请号 NL20102004924 申请日期 2010.06.21
申请人 ASML NETHERLANDS B.V., 发明人 DAMEN, JOHANNES
分类号 G03F7/20 主分类号 G03F7/20
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