摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming an organic material membrane on a surface of a substrate constituted by an inorganic material with a simple constitution in a relatively short time. Ž<P>SOLUTION: In the formation method for the organic material membrane, the surface of the substrate constituted by the inorganic material is subjected to an oxidation treatment and is exposed to a silane coupling agent vapor under a vacuum atmosphere, and thereafter, the organic material membrane is formed on the surface of the substrate. Ž<P>COPYRIGHT: (C)2006,JPO&NCIPI Ž |