发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for forming an organic material membrane on a surface of a substrate constituted by an inorganic material with a simple constitution in a relatively short time. Ž<P>SOLUTION: In the formation method for the organic material membrane, the surface of the substrate constituted by the inorganic material is subjected to an oxidation treatment and is exposed to a silane coupling agent vapor under a vacuum atmosphere, and thereafter, the organic material membrane is formed on the surface of the substrate. Ž<P>COPYRIGHT: (C)2006,JPO&NCIPI Ž
申请公布号 JP4617174(B2) 申请公布日期 2011.01.19
申请号 JP20050046288 申请日期 2005.02.22
申请人 发明人
分类号 B05D3/10;C23C14/02 主分类号 B05D3/10
代理机构 代理人
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