发明名称 CUTTING DEVICE AND DETECTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a cutting device free from fixing metal to a cutting blade, or locally damaging the cutting blade when detecting a reference height of the cutting blade such as a resin blade, and also to provide a detecting method of the reference height in a vertical directional position of the cutting blade. SOLUTION: The cutting device is provided with a liquid storage means 28 and a detecting means 42. The liquid storage means 28 has a liquid storage recessed part 30 having an opening upper surface, and a conductive liquid 34 is supplied here, and a height of its liquid level is set to a reference value as a reference liquid level 36. The detecting means 42 detects that the cutting blade 22 electrically contacts with the reference liquid level 36 by lowering the cutting blade 22 toward the reference liquid level 36. The vertical directional position of the cutting blade 22 in such a detection, is set as a reference height. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011073120(A) 申请公布日期 2011.04.14
申请号 JP20090229813 申请日期 2009.10.01
申请人 DISCO ABRASIVE SYST LTD 发明人 YASUDA YUKI;TANAKA MANPEI
分类号 B24B49/10;H01L21/301 主分类号 B24B49/10
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