| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator in a cantilever structure for fixing a piezoelectric diaphragm in a package accurately in a horizontal holding state while eliminating the need of strict management of conductive adhesives. <P>SOLUTION: The method of manufacturing a piezoelectric vibrator has: an adhesive applying step of applying conductive adhesives 251, 252 to a level difference 210 of a package 200 of transparent material; a temporary supporting member disposing step of disposing on the floor a temporary supporting member 300 which is made of a thermally deforming resin and is formed higher than the conductive adhesives applied to the level difference 210; a piezoelectric diaphragm placing step of placing a piezoelectric diaphragm 400 on the level difference coated with the conductive adhesives and on the temporary supporting member 300; a height adjusting step of irradiating the temporary supporting member with a laser through the transparent material to thermally deform the temporary supporting member, thereby adjusting the height of the piezoelectric diaphragm so that a free end of the piezoelectric diaphragm 400 becomes predetermined tilting lower than the free end; and a cantilever supporting step of forming a space between the piezoelectric diaphragm 400 and the temporary supporting member 300 by heating the conductive adhesives 251, 252 at a first temperature to harden them and heating the temporary supporting member 300 at a second temperature to deform it. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
