| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate folder which can reduce substrate breakage as much as possible by securely reducing a shock caused by vibration generated during transfer while preventing the lower side of the substrate from contacting with a lower side support member unsuitably in setting the substrate. <P>SOLUTION: A substrate folder 1 holds the substrate in a vertical attitude while the lower side of a glass substrate 2 is supported by a lower side supporting member 4 when transferring the glass substrate by a substrate transfer apparatus where the lower side supporting member 4 includes a placing portion 7 having a flat plane where the lower side of the glass substrate 2 is placed, and an elastic deformation portion 8 which supports the placing portion 7 from below, and is elastically deformable by the weight of the glass substrate 2 placed on the placing portion 7. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
