| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen adsorption detecting sensor and a hydrogen adsorption detector which are compact, and improve the degree of freedom in a design and a measurement. SOLUTION: The hydrogen adsorption detecting sensor 1 includes at least a substrate 2 having a light receiving surface 2a for entering and reflecting a light and a palladium thin film layer 4 provided on the light receiving surface 2a. The palladium thin film layer 4 or the substrate 2 forms a grating. The palladium thin film layer 4 adsorbs a hydrogen molecule. It is preferable that the grating is formed by a plurality of parallel rectangular grooves. It is preferable that a pitch of the grating is 1-2 μm. It is preferable that a layer thickness of the palladium thin film layer 4 is 1-20 nm. At least one inner thin film layer 3 is additionally provided between the palladium thin film layer 4 and the substrate 2. It is preferable that the inner thin film layer 3 contains silver, copper or aluminum. COPYRIGHT: (C)2011,JPO&INPIT
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