| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow control device and a flow control method, capable of further reducing instrumentation cost. <P>SOLUTION: The device includes a sensor 12 disposed in a flow passage 11 for passing gas, the sensor including a heat element, an upstream temperature measuring resistance element and a downstream temperature measuring resistance element; a physical property value calculation unit 311 which calculates a physical value of the gas based on detected temperatures by the upstream temperature measuring resistance element and downstream temperature measuring resistance element in heating of the heat element; a flow calculation unit 312 which calculates a flow rate of the gas based on the detected temperatures; a regulating valve 40 which is opened/closed in substitution of the gas to adjust the flow rate of the gas; a valve control unit 330 which controls the opening of the regulating valve 40 based on the calculated physical property value or flow rate; and a switching unit 320 which switches output signal of the sensor 12 to be input to either the physical value calculation unit 311 or the flow calculation unit 312. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
