SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus, system, and method that temporarily stores substrates by a simple structure without changing the processing order of the substrates in the subsequent apparatus.SOLUTION: A plurality of substrates 9 are temporarily stored in a first buffer 70 arranged closer to the upstream side in the transfer direction than a processing position 22a. Then, the substrates 9 are temporarily stored in a second buffer 80 arranged closer to the downstream side in the transfer direction than the processing position 22a. The first buffer 70 and the second buffer 80 are LIFO buffers, thereby allowing them to be achieved by a simpler structure than a FIFO buffer. The plurality of substrates 9 are stored in both the first buffer 70 and the second buffer 80, thereby allowing the substrates 9 to be carried out from the second buffer 80 in the same order as that when the substrates 9 are carried in. A change of the transfer order of the substrates 9 in the subsequent apparatus is prevented thereby.