| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus capable of accurately detecting an amine organic substance, and so on, contained in ultrapure water, within a short time and of evaluating the water quality of ultrapure water.SOLUTION: A water-quality evaluation method, by which sample water is run through a column housing silicon particles to evaluate the water quality of the sample water, based on dissolved hydrogen concentration in the water flowing out of the column, includes a step of running the sample water through a column A housing new silicon particles at a predetermined space velocity, and of implementing the evaluation step of evaluating the water quality of the sample water, based on the increase rate of the dissolved hydrogen concentration in the water flowing out of the column. When the increase rate of the dissolved hydrogen concentration reaches a reference value or higher, the method implements the switching step of switching to the column A or B housing the new silicon particles, and the re-evaluation step of performing the evaluation step again at a spatial velocity lower than the previous space velocity, with respect to the post-switching column A or B. |
