| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic chuck which allows quick heating and cooling of a substrate to be processed and which maintains high insulation. <P>SOLUTION: An electrostatic chuck comprises: a ceramic substrate, a ceramic dielectric which is installed on top of the ceramic substrate and has a first principal plane on which is mounted a substrate to be processed; and an electrode provided between the ceramic substrate and the ceramic dielectric. The material of the ceramic dielectric is ceramic sinter. Provided on the first principal plane of the ceramic dielectric are multiple protuberances and a conduit to provide gas. Provided on the bottom of the conduit is a penetration hole which penetrates to a second principal plane on the opposite side of the first principal plane of the ceramic substrate. The distance between the electrode and the conduit is the same as the distance between the electrode and the first principal plane or longer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
