发明名称 METHOD FOR MANUFACTURING THIN-FILM TYPE SOLAR CELL AND LASER MACHINING DEVICE
摘要 <p>PURPOSE: A thin film type solar battery manufacturing method and a laser processing apparatus are provided to integrate a system in order to perform an isolation process and edge deletion process in one apparatus, thereby reducing overall manufacturing costs. CONSTITUTION: A transfer table(20) supports a loaded thin film type solar battery substrate(50). The transfer table reciprocates along a first driving shaft(24). A laser integration part(40) comprises a plurality of laser units in which a part of a working area is overlapped each other. A gantry unit(30) transfers a laser integration part along a second driving shaft(36). The gantry unit includes a vertical frame(32) and a horizontal girder(34) which is installed between the vertical frame.</p>
申请公布号 KR20110120478(A) 申请公布日期 2011.11.04
申请号 KR20100039906 申请日期 2010.04.29
申请人 MEERE COMPANY INC. 发明人 KIM, BYEONG KYOUM;BAEK, KWANG SOO;KANG, HYUN GU;SONG, CHEONG HO;LEE, BYUNG GUK;GIM, GWANG IL
分类号 H01L31/18;H01L31/04 主分类号 H01L31/18
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