| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray photoelectron spectroscopy device and an X-ray photoelectron spectroscopy method capable of accurately acquiring the energy spectrum of photoelectrons discharged from a measurement object in a short time. <P>SOLUTION: The energy spectrum obtained by a detector 40 when an electron 4 generated in a measurement object 2 by the irradiation of an X-ray 3 outputted from an X-ray source 10 reaches the detector 40 through an electron lens 20 and an energy analyzer 30 is corrected on the basis of the energy spectrum obtained by the detector 40 as the one of a band equivalent to an inhibition band more on the low constraint energy side than the Fermi level of the measurement object 2 with the adjustment of the deceleration of the electron 4 by the electron lens 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
