| 摘要 |
<p>PURPOSE: A method for forming the sample of a particle counter and a method for verifying the particle counter are provided to shorten tact time by forming a plurality of metal particles on a substrate using a mask. CONSTITUTION: A metal layer(120) is formed on a substrate(110) by a deposition method. Photo-resists(130,135) are formed on the metal layer. The metal layer is divided into a plurality of metal particles(125) by exposing the photo-resists and the photo-resists are eliminated. A plurality of metal particles which is divided on the substrate is verified. A plurality of metal particles is divided so that a plurality of metal particles has one and more sizes according to a domain of the substrate while having same size and uniform community.</p> |
