| 摘要 |
PURPOSE: An imprinting method, an imprinting apparatus, a sample shot sampling method and a manufacturing method using the same are provided to control the work load of manufacturing process and effectively re-interpolate the coating distribution of the uncured resin material. CONSTITUTION: An imprinting apparatus comprises a mold(20), a mold actuating unit(14), a dispenser(17), a light source(19), a dispenser control unit(43) and a main control unit(40). A mold pattern is formed in the mold. The mold actuating transfers the mold toward and apart from a substrate(30). The dispenser spreads the uncured resin material in the substrate. The light source solidifies the uncured resin material to the resin pattern. The dispenser control unit generates the coating distribution of the uncured resin material and controls the dispenser. The main control unit uses the shot layout information in consideration of relative position among plural shot positions, the dispenser, and the light source. The main control unit interpolates the coating distribution of the uncured resin material using the layout information. |
