发明名称 MANUFACTURING METHOD OF ABSORBER OF CIS SOLAR SELL SYSTEM FABRICATED BY SAFTY SELENIUM SOURCES
摘要 PURPOSE: A method for manufacturing absorbing layer of CIS(CuInSe2) thin film solar sell system is provided to solve a problem by a poisonous gas by evaporating a liquid selenium source to a carrier gas and using for a selenization process. CONSTITUTION: A back plate is evaporated on a substrate. A Cu(Cuprum)-III family metal is evaporated on the back plate. A CIS system absorbing layer is made on a deposited metal with a selenization process. The selenization process includes a process using a liquid selenium source. An III group metal, which is deposited on the back electrode, is one or more of In(Indium) and Ga(Gallium).
申请公布号 KR20120007166(A) 申请公布日期 2012.01.20
申请号 KR20100067771 申请日期 2010.07.14
申请人 KOREA PHOTONICS TECHNOLOGY INSTITUTE 发明人 KO, HANG JU;KIM, HYO JIN;HAN, MYUNG SOO
分类号 H01L31/0445 主分类号 H01L31/0445
代理机构 代理人
主权项
地址