| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology advantageous in terms of implementation with respect to a charged particle beam drawing apparatus including a plurality of blankers. <P>SOLUTION: The charged particle beam drawing apparatus comprises a blanking aperture array 117 having a plurality of blanking apertures, a blanking unit 116 having a plurality of blankers which control a plurality of charged particle beams, respectively, so that charged particle beams which must not impinge on a substrate 120 are blanked by the blanking aperture array 117, a blanking command generation circuit 104 which generates a blanking command in order to control the plurality of blankers, and a serial transmission cable 105 which transmits a blanking command generated by the blanking command generation circuit 104 to the blanking unit 116. The blanking unit 116 converts the blanking command into parallel data and drives the plurality of blankers based on the blanking command converted into parallel data. <P>COPYRIGHT: (C)2012,JPO&INPIT |
