SEMICONDUCTOR FILM, SEMICONDUCTOR ELEMENT, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A semiconductor film, a semiconductor device, a semiconductor apparatus, and a manufacturing method thereof are provided to stabilize electrical characteristics by forming a seed crystal layer and an oxide semiconductor film. CONSTITUTION: A first semiconductor layer contacts with an insulating surface(102). The first semiconductor layer comprises a first crystal having a first crystal structure. A second semiconductor layer contacts with the first semiconductor layer. The semiconductor layer comprises a second crystal having a second crystal structure. The first semiconductor layer has crystalline higher than the second semiconductor layer. A first crystal structure is a wurtzite type structure. A second crystalline structure has a hetero-structure.