| 摘要 |
<p>PURPOSE: A laser processing machine is provided to self-break a substrate and to correct the divergence angle of laser beams. CONSTITUTION: A laser processing machine comprises laser sources(10) and an optical unit(20). The optical unit guides laser beams generated from the laser sources to the inside of objects. The optical unit comprises a beam shaping module(210), a diffraction grating(220), and a focusing lens(230). The beam shaping module corrects the divergence angle of the laser beams. The diffraction grating diffracts the laser beams. The focusing lens comprises a spot by focusing the laser beams on the inside of the objects.</p> |
